Chemical Polishing Process of GaAs
نویسندگان
چکیده
منابع مشابه
Chemical polishing method of GaAs specimens for transmission electron microscopy.
A practical method for transmission electron microscopy specimen preparation of GaAs-based materials with quantum dot structures is presented to show that high-quality image observations in high-resolution transmission electron microscopy (HRTEM) can be effectively obtained. Specimens were prepared in plan-view and cross-section using ion milling, followed by two-steps chemical fine polishing w...
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ژورنال
عنوان ژورنال: Journal of the Japan Society of Precision Engineering
سال: 1970
ISSN: 0374-3543
DOI: 10.2493/jjspe1933.36.375